Closed-loop scanning stages are flexure-guided

Closed-loop scanning stages are flexure-guided Closed-loop flexure-guided piezoelectric scanning stages provide a record travel range of 1000 microns and allow nanotechnology/precision microscopy probing of larger areas than before. PI (Physik Instrumente), a leading manufacturer of nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, offers the new closed-loop P-628.2CD XY piezoelectric stages. These precision flexure-guided scanning stages provide a record travel range of 1000 micron and allow nanometrology / precision microscopy instrument designers to probe much larger areas than before.

A lower cost, single axis version is also offered.

Typical applications include scanning probe microscopy, nanometrology, biotechnology, interferometry, nanopositioning, quality assurance, semiconductor technology.

* Controllers include high speed, digital control - a variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.

* Record travel range of 1000 micron, yet very stiff and precise - the long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy with trajectory precision in the low-nanometer range.

High acceleration forces are provided by multiple, newly-developed high-force multilayer piezo stack actuators.

Features and advantages include the following.

* 1000 micron XY-travel allows probing larger areas.

* Closed-loop digital control for up to 99.98% position accuracy.

* Vacuum-compatible.

* Stiff and compact design for high resonant frequencies and easy integration.

* Resolution <1nm.

* Frictionless, maintenance-free precision flexure guiding system.

* Ceramic-encapsulated piezo drives for humidity protection.

* Capacitive direct-metrology sensors for faster servo response.

* Maintenance-free, no wear and tear - because flexure-guides, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.

The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.

* Higher linearity through direct-motion metrology with capacitive sensors - the stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range.

PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.